Author/Creator: Sakurai, Ayumi - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Sakurai, Ayumi

1. By-Product Formation in a Trichlorosilane-Hydrogen System for Silicon Film Deposition. (13th November 2014)

Authors:: Habuka, Hitoshi; Sakurai, Ayumi; Saito, Ayumi
Journal:: ECS journal of solid state science and technology
Issue:: Volume 4:Number 2(2015)
Page Start:: P16
Record Type:: Journal Article
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2. By-Product Formation in a Trichlorosilane-Hydrogen System for Silicon Film Deposition. (1st January 2015)

Authors:: Habuka, Hitoshi; Sakurai, Ayumi; Saito, Ayumi
Journal:: ECS journal of solid state science and technology
Issue:: Volume 4:Number 2(2015)
Page Start:: P16
Record Type:: Journal Article
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3. Parallel langmuir processes for silicon epitaxial growth in a SiHCl3-SiHx-H2 system. (December 2017)

Authors:: Watanabe, Toru; Yamada, Ayami; Saito, Ayumi; Sakurai, Ayumi; Habuka, Hitoshi
Journal:: Materials science in semiconductor processing
Issue:: Volume 72(2017)
Page Start:: 134
Record Type:: Journal Article
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4. Silicon epitaxial growth accelerated by parallel Langmuir processes using SiH2Cl2 and SiH3CH3 gases. (26th July 2018)

Authors:: Yamada, Ayami; Muroi, Mitsuko; Watanabe, Toru; Saito, Ayumi; Sakurai, Ayumi; Habuka, Hitoshi
Journal:: Semiconductor science and technology
Issue:: Volume 33:Number 9(2018:Sep.)
Page Start:
Record Type:: Journal Article
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