1. Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. Issue 19 (January 2020) Authors: Versolato, O; Bayerle, A; Bayraktar, M; Behnke, L; Bekker, H; Bouza, Z; Colgan, J; Crespo López-Urrutia, J R; Deuzeman, M J; Hoekstra, R; Kurilovich, D; Liu, B; Meijer, R; Neukirch, A; Poirier, L; Rai, S; Ryabtsev, A; Scheers, J; Schupp, R; Sheil, J Journal: Journal of physics Issue: Volume 1412:Issue 19(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗