1. Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials. Issue 1791 (2015) Authors: Klepper, Karina B.; Miikkulainen, Ville; Nilsen, Ola; Fjellvåg, Helmer; Liu, Ming; Dutta, Dhanadeep; Gidley, David; Lanford, William; Ross, Liza; Li, Han; King, Sean W. Editors: Kondoh, E.; Baklanov, M.; Bielefeld, J.D.; Jousseaume, V. Journal: MRS proceedings Issue: Issue 1791(2015) Page Start: 15 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Erratum: Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride [ECS J. Solid State Sci. Technol., 6, N189 (2017)]. (1st January 2018) Authors: Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ... Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 5(2018) Page Start: X3 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Erratum: Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride [ECS J. Solid State Sci. Technol., 6, N189 (2017)]. (24th April 2018) Authors: Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ... Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 5(2018) Page Start: X3 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films. (14th November 2014) Authors: Prakash, Adithya; Todi, Vinit; Sundaram, Kalpathy B.; Ross, Liza; Xu, Guanghai; French, Marc; Henry, Patrick; King, Sean W. Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3122 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films. (1st January 2015) Authors: Prakash, Adithya; Todi, Vinit; Sundaram, Kalpathy B.; Ross, Liza; Xu, Guanghai; French, Marc; Henry, Patrick; King, Sean W. Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3122 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride. (1st January 2017) Authors: Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ... Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 10(2017) Page Start: N189 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride. (5th October 2017) Authors: Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ... Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 10(2017) Page Start: N189 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗