1. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT). (30th January 2015) Authors: Dezest, D; Thomas, O; Mathieu, F; Mazenq, L; Soyer, C; Costecalde, J; Remiens, D; Deü, J F; Nicu, L Journal: Journal of micromechanics and microengineering Issue: Volume 25:Number 3(2015:Mar.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗