1. Advanced Millisecond Annealing Approaches for High-k Metal Gate and Contact Scaling. (20th July 2018) Authors: Sharma, Shashank; Chen, Jaujiun; Ng, Ben; McIntosh, Robert C; Muthukrishnan, Shankar; Raman Sharma, Karthik; Graoui, Houda; Mayur, Abhilash Journal: ECS transactions Issue: Volume 86:Number 2(2018) Page Start: 3 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗