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You searched for: Author/Creator Pyo, Y.Limit your search
- Pyo, Y. [remove] 1
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- Electronics -- Periodicals 1
- error compensation -- light interferometers -- environmental factors -- displacement measurement -- capacitive sensors -- capacitance measurement -- optical sensors 1
- error compensation algorithm -- heterodyne laser interferometer -- ultraprecise measurement apparatus -- environmental error -- nanometre‐scale measurement accuracy -- environmental error factor minimization -- Lagrange multiplier method -- nanometre‐scale measurement -- capacitive displacement sensor 1