Lagrange multiplier‐based error compensation of heterodyne interferometer. Issue 20 (13th September 2016)

• Record Type: Journal Article
• Authors: Lee, K.; Pyo, Y.; You, K.
• Is Part Of: Electronics letters. Volume 52:Issue 20(2016)
• Page Start: 1692
• Page End: 1694
• Publication Date: 2016-09-13
• Subjects: error compensation -- light interferometers -- environmental factors -- displacement measurement -- capacitive sensors -- capacitance measurement -- optical sensors; error compensation algorithm -- heterodyne laser interferometer -- ultraprecise measurement apparatus -- environmental error -- nanometre‐scale measurement accuracy -- environmental error factor minimization -- Lagrange multiplier method -- nanometre‐scale measurement -- capacitive displacement sensor; Electronics -- Periodicals; 621.381
• DOI: 10.1049/el.2016.1815
• Languages: English
• ISSNs: 0013-5194

Abstract

Abstract : The heterodyne laser interferometer is an ultra‐precise measurement apparatus. However, its susceptibility to environmental error is an obstacle to improve its nanometre‐scale measurement accuracy. To minimise the environmental error factor, a compensation algorithm using a Lagrange multiplier method is proposed. The improved accuracy of the proposed method was verified by means of experiments using nanometre‐scale measurements of a capacitive displacement sensor.