1. A physics-informed Run-to-Run control framework for semiconductor manufacturing. (1st October 2020) Authors: Yang, Wei-Ting; Blue, Jakey; Roussy, Agnès; Pinaton, Jacques; Reis, Marco S. Journal: Expert systems with applications Issue: Volume 155(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Alarm Activations Analysis for Performance Enhancement in a Semiconductor Facility. Issue 6 (2022) Authors: Al-kharaz, Mohammed; Ananou, Bouchra; Ouladsine, Mustapha; Combal, Michel; Pinaton, Jacques Journal: IFAC-PapersOnLine Issue: Volume 55:Issue 6(2022) Page Start: 439 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing. (December 2016) Authors: Nguyen, T.B. Lien; Djeziri, Mohand; Ananou, Bouchra; Ouladsine, Mustapha; Pinaton, Jacques Journal: Journal of process control Issue: Volume 48(2016:Dec.) Page Start: 72 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Optimized allocation of defect inspection capacity with a dynamic sampling strategy. (January 2015) Authors: Rodriguez-Verjan, Gloria Luz; Dauzère-Pérès, Stéphane; Pinaton, Jacques Journal: Computers & operations research Issue: Volume 53(2015) Page Start: 319 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Regression Methods for Predicting the Product's Quality in the Semiconductor Manufacturing Process*. Issue 12 (2016) Authors: Melhem, Mariam; Ananou, Bouchra; Ouladsine, Mustapha; Pinaton, Jacques Journal: IFAC-PapersOnLine Issue: Volume 49:Issue 12(2016) Page Start: 83 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Remaining Useful Life estimation for noisy degradation trends. Issue 21 (2015) Authors: Nguyen, Thi-Bich-Lien; Djeziri, Mohand; Ananou, Bouchra; Ouladsine, Mustapha; Pinaton, Jacques Journal: IFAC-PapersOnLine Issue: Volume 48:Issue 21(2015) Page Start: 85 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Unsupervised Semiconductor chamber matching based on shape comparison. Issue 1 (July 2017) Authors: Marino, Julien; Rossi, Francesco; Ouladsine, Mustapha; Pinaton, Jacques Journal: IFAC-PapersOnLine Issue: Volume 50:Issue 1(2017) Page Start: 3905 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗