1. Development of Glyoxylic Acid Based Electroless Copper Deposition on Ruthenium. (7th April 2015) Authors: Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu Journal: ECS transactions Issue: Volume 64:Number 40(2014) Page Start: 41 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Glyoxylic Acid as Reducing Agent for Electroless Copper Deposition on Cobalt Liner. (7th April 2015) Authors: Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu Journal: ECS transactions Issue: Volume 64:Number 40(2014) Page Start: 63 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Immersion and electrochemical deposition of Ru on Si. (1st June 2018) Authors: Philipsen, Harold; Monnens, Wouter Journal: Electrochimica acta Issue: Volume 274(2018) Page Start: 306 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Nucleation and growth kinetics of electrodeposited Ni films on Si(100) surfaces. (10th March 2017) Authors: Philipsen, Harold; Jehoul, Hannes; Inoue, Fumihiro; Vandersmissen, Kevin; Yang, Liu; Struyf, Herbert; van Dorp, Dennis Journal: Electrochimica acta Issue: Volume 230(2017) Page Start: 407 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Role of Bath Composition in Electroless Cu Seeding on Co Liner for through-Si Vias. (1st January 2015) Authors: Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen H.; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3108 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Role of Bath Composition in Electroless Cu Seeding on Co Liner for through-Si Vias. (6th November 2014) Authors: Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen H.; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3108 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions. (20th May 2019) Authors: Philipsen, Harold; Mouwen, Nils; Teck, Sander; Monnens, Wouter; Le, Quoc Toan; Holsteyns, Frank; Struyf, Herbert Journal: Electrochimica acta Issue: Volume 306(2019) Page Start: 285 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗