1. Oxygen accumulation effect for depth profiling of thin‐multilayered sample using low‐energy oxygen ion beam. (17th July 2012) Authors: Nishinomiya, Suguru; Kubota, Naoyoshi; Hayashi, Shun‐ichi; Takenaka, Hisataka Journal: Surface and interface analysis Issue: Volume 45:Number 1(2013:Jan.) Page Start: 107 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗