1. Green Lithography for Delicate Materials. (23rd April 2021) Authors: Grebenko, Artem; Bubis, Anton; Motovilov, Konstantin; Dremov, Viacheslav; Korostylev, Evgeny; Kindiak, Ivan; Fedorov, Fedor S.; Luchkin, Sergey; Zhuikova, Yuliya; Trofimenko, Aleksandr; Filkov, Gleb; Sviridov, Georgiy; Ivanov, Andrey; Dull, Jordan T.; Mozhchil, Rais; Ionov, Andrey; Varlamov, Vale... Journal: Advanced functional materials Issue: Volume 31:Number 27(2021) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗