1. Predictive modeling and analysis of HfO2 thin film process based on Bayesian information criterion using PCA‐based neural networks. (8th May 2013) Authors: Ko, Young‐Don; Moon, Pyung; Kim, Chang Eun; Ham, Moon‐Ho; Jeong, Myong‐Kee; Garcia‐Diaz, Alberto; Myoung, Jae‐Min; Yun, Ilgu Journal: Surface and interface analysis Issue: Volume 45:Number 9(2013:Sep.) Page Start: 1334 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗