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Author/Creator Miskin, Marc Z.

5. Micromechanical Systems: Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms (Adv. Mater. 29/2019). Issue 29 (16th July 2019)

Authors:
Dorsey, Kyle J.; Pearson, Tanner G.; Esposito, Edward; Russell, Sierra; Bircan, Baris; Han, Yimo; Miskin, Marc Z.; Muller, David A.; Cohen, Itai; McEuen, Paul L.
Journal:
Advanced materials
Issue:
Volume 31:Issue 29(2019)
Page Start:
n/a
Record Type:
Journal Article
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