Micromechanical Systems: Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms (Adv. Mater. 29/2019). Issue 29 (16th July 2019)

• Record Type: Journal Article
• Authors: Dorsey, Kyle J.; Pearson, Tanner G.; Esposito, Edward; Russell, Sierra; Bircan, Baris; Han, Yimo; Miskin, Marc Z.; Muller, David A.; Cohen, Itai; McEuen, Paul L.
• Is Part Of: Advanced materials. Volume 31:Issue 29(2019)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-07-16
• Subjects: atomic layer deposition -- kirigami -- metamaterials -- nanofabrication -- NEMS; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adma.201970212
• Languages: English
• ISSNs: 0935-9648

Abstract

Abstract : In article number 1901944, Itai Cohen, and Paul L. McEuen, and co‐workers describe micromechanical structures, metamaterials, and actuators fabricated from nanometer‐thick films produced by atomic‐layer deposition (ALD) on sacrificial layers. Devices fabricated in this way are extraordinarily sensitive to small forces and torques because they exhibit ultralow bending stiffness. The microfabrication process is compatible with semiconductor processing, enabling seamless integration of ALD actuators and electronics for applications in microrobotics.