Author/Creator: Minh, Mai Hong - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Minh, Mai Hong

1. Non-Heat Assistance Plasma-Enhanced Chemical Vapor Deposition of SiCxNyOz Film Using Monomethylsilane, Nitrogen and Argon. (1st January 2017)

Authors:: Minh, Mai Hong; Watanabe, Toru; Shioda, Kohei; Habuka, Hitoshi
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 7(2017)
Page Start:: P443
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Non-Heat Assistance Plasma-Enhanced Chemical Vapor Deposition of SiCxNyOz Film Using Monomethylsilane, Nitrogen and Argon. (6th June 2017)

Authors:: Minh, Mai Hong; Watanabe, Toru; Shioda, Kohei; Habuka, Hitoshi
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 7(2017)
Page Start:: P443
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗