1. (Invited) Sequential 3D Process Integration: Opportunities for Low Temperature Processing. (1st August 2017) Authors: Kerdilès, Sébastien; Acosta-Alba, Pablo; Mathieu, Benoit; Veillerot, Marc; Denis, Hervé; Aussenac, François; Mazzamuto, Fulvio; Toque-Tresonne, Inès; Huet, Karim; Samson, Marie-Pierre; Previtali, Bernard; Brunet, Laurent; Batude, Perrine; Fenouillet-Beranger, Claire Journal: ECS transactions Issue: Volume 80:Number 4(2017) Page Start: 215 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗