1. Determination of the Model for the Chemical Structure of Porous PECVD Low-k Films. (1st January 2015) Authors: Verdonck, P.; Le, Quoc Toan; Devonport, J.; Huanca, D. R.; dos Santos Filho, S. G.; Conard, T.; Meersschaut, J.; Baklanov, M. R.; Van Elshocht, S. Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3140 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Determination of the Model for the Chemical Structure of Porous PECVD Low-k Films. (21st November 2014) Authors: Verdonck, P.; Le, Quoc Toan; Devonport, J.; Huanca, D. R.; dos Santos Filho, S. G.; Conard, T.; Meersschaut, J.; Baklanov, M. R.; Van Elshocht, S. Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3140 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Development of a Cu and W Compatible PERR Clean in BEOL Advanced Interconnect Patterning. (11th September 2015) Authors: Kesters, Els; Le, Quoc Toan; Decoster, Stefan; Vega Gonzalez, Victor; Holsteyns, Frank; De Gendt, Stefan Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 207 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Study of Copper Surface Preparation by Sequential Atomic Layer Wet Etching and Laser Annealing Treatments. (15th August 2017) Authors: Iwasaki, Akihisa; Akanishi, Yuya; Mazzamuto, Fulvio; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank Journal: ECS transactions Issue: Volume 80:Number 2(2017) Page Start: 233 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions. (20th May 2019) Authors: Philipsen, Harold; Mouwen, Nils; Teck, Sander; Monnens, Wouter; Le, Quoc Toan; Holsteyns, Frank; Struyf, Herbert Journal: Electrochimica acta Issue: Volume 306(2019) Page Start: 285 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗