1. Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials. Issue 1791 (2015) Authors: Klepper, Karina B.; Miikkulainen, Ville; Nilsen, Ola; Fjellvåg, Helmer; Liu, Ming; Dutta, Dhanadeep; Gidley, David; Lanford, William; Ross, Liza; Li, Han; King, Sean W. Editors: Kondoh, E.; Baklanov, M.; Bielefeld, J.D.; Jousseaume, V. Journal: MRS proceedings Issue: Issue 1791(2015) Page Start: 15 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗