Author/Creator: Kellock, A. J. - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Kellock, A. J.

1. Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect. (1st January 2017)

Authors:: Van Nguyen, Son; Hosadugra, Shobha; Haigh, T.; Yao, Y.; Tai, L.; Cohen, S.; Shaw, T.; Hu, C. K.; Liniger, E.; Virwani, K.; Kellock, A. J.; Canaperi, D.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 7(2017)
Page Start:: P429
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect. (25th May 2017)

Authors:: Van Nguyen, Son; Hosadugra, Shobha; Haigh, T.; Yao, Y.; Tai, L.; Cohen, S.; Shaw, T.; Hu, C. K.; Liniger, E.; Virwani, K.; Kellock, A. J.; Canaperi, D.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 7(2017)
Page Start:: P429
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗