1. Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code. (1st April 2023) Authors: Eremin, D; Berger, B; Engel, D; Kallähn, J; Köhn, K; Krüger, D; Xu, L; Oberberg, M; Wölfel, C; Lunze, J; Awakowicz, P; Schulze, J; Brinkmann, R P Journal: Plasma sources science & technology Issue: Volume 32:Number 4(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Experimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas. (25th October 2018) Authors: Oberberg, M; Kallähn, J; Awakowicz, P; Schulze, J Journal: Plasma sources science & technology Issue: Volume 27:Number 10(2018:Oct.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗