1. Back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation. Issue 8 (26th February 2020) Authors: Lehninger, David; Olivo, Ricardo; Ali, Tarek; Lederer, Maximilian; Kämpfe, Thomas; Mart, Clemens; Biedermann, Kati; Kühnel, Kati; Roy, Lisa; Kalkani, Mahsa; Seidel, Konrad Journal: Physica status solidi Issue: Volume 217:Issue 8(2020) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation. Issue 8 (27th April 2020) Authors: Lehninger, David; Olivo, Ricardo; Ali, Tarek; Lederer, Maximilian; Kämpfe, Thomas; Mart, Clemens; Biedermann, Kati; Kühnel, Kati; Roy, Lisa; Kalkani, Mahsa; Seidel, Konrad Journal: Physica status solidi Issue: Volume 217:Issue 8(2020) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗