1. P.37: Novel Gray‐toneless Technology for Mask Reduction in High Aperture Rate FFS Mode. Issue 1 (1st July 2013) Authors: Choi, Seungjin; Sun, Shuang; Kim, Kiyong; Niu, Jing; Zhang, Fangzhen; Kang, Minsung; Jung, Bongkwan; Song, Youngjin; Hui, Guanbao; Xue, Jianshe Journal: Digest of technical papers Issue: Volume 44:Issue 1(2013) Page Start: 1126 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. P.37: Novel Gray‐toneless Technology for Mask Reduction in High Aperture Rate FFS Mode. Issue 1 (1st July 2013) Authors: Choi, Seungjin; Sun, Shuang; Kim, Kiyong; Niu, Jing; Zhang, Fangzhen; Kang, Minsung; Jung, Bongkwan; Song, Youngjin; Hui, Guanbao; Xue, Jianshe Journal: Digest of technical papers Issue: Volume 44:Issue 1(2013) Page Start: 1126 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗