1. 3D Nanoscale Imaging of Semiconductor Films for GAA (Gate All Around) Device Development. (August 2022) Authors: Parikh, Pritesh; Jaware, Darshan; Zhu, Jiangtao Journal: Microscopy and microanalysis Issue: Volume 28(2022)Supplement 1 Page Start: 318 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗