3D Nanoscale Imaging of Semiconductor Films for GAA (Gate All Around) Device Development. (August 2022)

Record Type:: Journal Article
Title:: 3D Nanoscale Imaging of Semiconductor Films for GAA (Gate All Around) Device Development. (August 2022)
Main Title:: 3D Nanoscale Imaging of Semiconductor Films for GAA (Gate All Around) Device Development
Authors:: Parikh, Pritesh
Jaware, Darshan
Zhu, Jiangtao
Abstract:
Is Part Of:: Microscopy and microanalysis. Volume 28(2022)Supplement 1
Journal:: Microscopy and microanalysis
Issue:: Volume 28(2022)Supplement 1
Issue Display:: Volume 28, Issue 1 (2022)
Year:: 2022
Volume:: 28
Issue:: 1
Issue Sort Value:: 2022-0028-0001-0000
Page Start:: 318
Page End:: 319
Publication Date:: 2022-08
Subjects:: Microscopy -- Periodicals
Microchemistry -- Periodicals
502.82
Journal URLs:: https://academic.oup.com/mam ↗
http://journals.cambridge.org/action/displayJournal?jid=MAM ↗
http://link.springer.de/link/service/journals/10005/index.htm ↗
http://firstsearch.oclc.org ↗
DOI:: 10.1017/S1431927622002045 ↗
Languages:: English
ISSNs:: 1431-9276
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library HMNTS - ELD Digital store
Ingest File:: 22823.xml