1. Scaling/LER study of Si GAA nanowire FET using 3D finite element Monte Carlo simulations. (February 2017) Authors: Elmessary, Muhammad A.; Nagy, Daniel; Aldegunde, Manuel; Seoane, Natalia; Indalecio, Guillermo; Lindberg, Jari; Dettmer, Wulf; Perić, Djordje; García-Loureiro, Antonio J.; Kalna, Karol Journal: Solid-state electronics Issue: Volume 128(2017) Page Start: 17 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗