Author/Creator: Huff, Michael - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Huff, Michael

1. Comparison of the Etch Mask Selectivity of Nickel and Copper for a Deep, Anisotropic Plasma Etching Process of Silicon Carbide (SiC). (17th January 2018)

Authors:: Ozgur, Mehmet; Pedersen, Michael; Huff, Michael
Journal:: ECS journal of solid state science and technology
Issue:: Volume 7:Number 2(2018)
Page Start:: P55
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Comparison of the Etch Mask Selectivity of Nickel and Copper for a Deep, Anisotropic Plasma Etching Process of Silicon Carbide (SiC). (1st January 2018)

Authors:: Ozgur, Mehmet; Pedersen, Michael; Huff, Michael
Journal:: ECS journal of solid state science and technology
Issue:: Volume 7:Number 2(2018)
Page Start:: P55
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

3. Development of Process Recipes for Maximum Mask Etch Selectivity and Maximum Etch Rate Having Vertical Sidewalls for Deep, Highly-Anisotropic Inductively-Coupled Plasma (ICP) Etching of Fused Silica. (1st January 2017)

Authors:: Pedersen, Michael; Huff, Michael
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 9(2017)
Page Start:: P644
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

4. Development of Process Recipes for Maximum Mask Etch Selectivity and Maximum Etch Rate Having Vertical Sidewalls for Deep, Highly-Anisotropic Inductively-Coupled Plasma (ICP) Etching of Fused Silica. (14th September 2017)

Authors:: Pedersen, Michael; Huff, Michael
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 9(2017)
Page Start:: P644
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

5. EDITOR'S CHOICE: Coho salmon spawner mortality in western US urban watersheds: bioinfiltration prevents lethal storm water impacts. Issue 2 (8th October 2015)

Authors:: Spromberg, Julann A.; Baldwin, David H.; Damm, Steven E.; McIntyre, Jenifer K.; Huff, Michael; Sloan, Catherine A.; Anulacion, Bernadita F.; Davis, Jay W.; Scholz, Nathaniel L.
Editors:: Blanchard, Julia
Journal:: Journal of applied ecology
Issue:: Volume 53:Issue 2(2016:Apr.)
Page Start:: 398
Record Type:: Journal Article
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6. Process Variations in Microsystems Manufacturing. (2020)

Authors:: Huff, Michael
Record Type:: Book
Extent:: 1 online resource (521 pages)
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

7. Review—Important Considerations Regarding Device Parameter Process Variations in Semiconductor-Based Manufacturing. (8th June 2021)

Authors:: Huff, Michael
Journal:: ECS journal of solid state science and technology
Issue:: Volume 10:Number 6(2021)
Page Start:
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗