Process Variations in Microsystems Manufacturing. (2020)

• Record Type: Book
• Further Information: Note: Michael Huff.
• Authors: Huff, Michael
• Contents: Introduction.- Overview of Microsystems Manufacturing.- Process Variations in Microsystems Processing Steps.- Microsystems Metrology Methods and Associated Errors.- Process Integration and Variations in Material Properties.- Device Parameter Variations in Microsystems Manufacturing.- Quality Assurance and Control Methods Used in Microsystems Manufacturing.- Design Methods for Handling Process Variations.- Future Methods for Improved Microsystems Manufacturing Process Variations.
• Publisher Details: Cham : Springer
• Publication Date: 2020
• Copyright Date: 2020
• Extent: 1 online resource (521 pages)
• Subjects: Engineering; Nanotechnology; Manufactures; Electronic circuits; Technology & Engineering -- Manufacturing; Technology & Engineering -- Nanotechnology & MEMS; Technology & Engineering -- Electronics -- Circuits -- General; Production engineering; Nanotechnology; Circuits & components; Precision instruments manufacture
• Languages: English
• ISBNs: 9783030405601
• Related ISBNs: 9783030405588
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.