21. Molecular dynamics study on fluorine radical multilayer adsorption mechanism during Si, SiO2, and Si3N4 etching processes. (21st October 2016) Authors: Numazawa, Satoshi; Machida, Ken; Isobe, Michiro; Hamaguchi, Satoshi Journal: Japanese journal of applied physics Issue: Volume 55:Number 11(2016:Nov.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
22. Molybdenum Capping Layer Effect on Electromigration Failure of Plasma Etched Copper Lines. (3rd July 2019) Authors: Su, Jia Quan; Li, Mingqian; Kuo, Yue; Hamaguchi, Satoshi Journal: ECS transactions Issue: Volume 92:Number 5(2019) Page Start: 39 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
23. Monitoring of nonthermal plasma degradation of phthalates by ion mobility spectrometry. Issue 7 (3rd May 2021) Authors: Moravský, Ladislav; Michalczuk, Bartosz; Hrdá, Jana; Hamaguchi, Satoshi; Matejčík, Štefan Journal: Plasma processes and polymers Issue: Volume 18:Issue 7(2021) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
24. Novel sex‐determining genes in fish and sex chromosome evolution. Issue 4 (1st March 2013) Authors: Kikuchi, Kiyoshi; Hamaguchi, Satoshi Journal: Developmental dynamics Issue: Volume 242:Issue 4(2013:Apr.) Page Start: 339 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
25. Roles of the reaction boundary layer and long diffusion of stable reactive nitrogen species (RNS) in plasma-irradiated water as an oxidizing media — numerical simulation study. (1st July 2022) Authors: Ikuse, Kazumasa; Hamaguchi, Satoshi Journal: Japanese journal of applied physics Issue: Volume 61:Number 7(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
26. Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies. (1st January 2023) Authors: Kambara, Makoto; Kawaguchi, Satoru; Lee, Hae June; Ikuse, Kazumasa; Hamaguchi, Satoshi; Ohmori, Takeshi; Ishikawa, Kenji Journal: Japanese journal of applied physics Issue: Volume 62:Number SA(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
27. Special issue: Plasmas for microfabrication. Issue 9 (13th August 2019) Authors: Hamaguchi, Satoshi; Agarwal, Sumit; Zajickova, Lenka; Wertheimer, Michael R. Other Names: Hamaguchi Satoshi guestEditor.; Agarwal Sumit guestEditor.; Zajickova Lenka guestEditor. Journal: Plasma processes and polymers Issue: Volume 16:Issue 9(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
28. Structural and electrical characteristics of ion-induced Si damage during atomic layer etching. (1st July 2022) Authors: Hirata, Akiko; Fukasawa, Masanaga; Kugimiya, Katsuhisa; Karahashi, Kazuhiro; Hamaguchi, Satoshi; Hagimoto, Yoshiya; Iwamoto, Hayato Journal: Japanese journal of applied physics Issue: Volume 61:Number SI(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
29. The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions. (1st September 2022) Authors: Tennyson, Jonathan; Mohr, Sebastian; Hanicinec, M; Dzarasova, Anna; Smith, Carrick; Waddington, Sarah; Liu, Bingqing; Alves, Luís L; Bartschat, Klaus; Bogaerts, Annemie; Engelmann, Sebastian U; Gans, Timo; Gibson, Andrew R; Hamaguchi, Satoshi; Hamilton, Kathryn R; Hill, Christian; O'Connell, Debo... Journal: Plasma sources science & technology Issue: Volume 31:Number 9(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
30. The effect of photoemission on nanosecond helium microdischarges at atmospheric pressure. (29th May 2018) Authors: Donkó, Zoltán; Hamaguchi, Satoshi; Gans, Timo Journal: Plasma sources science & technology Issue: Volume 27:Number 5(2018:Oct.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗