1. 28 nm FD-SOI MEOL parasitic capacitance segmentation using electrical testing and semiconductor process modeling. (February 2023) Authors: Vianne, B.; Guillo-Lohan, B.; Quenette, V.; Legoix, B.; Vincent, B. Journal: Solid-state electronics Issue: Volume 200(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗