1. (Invited)Development of Plasma Atomic Layer Etching in Close-to-Conventional Etch Tools. (9th April 2018) Authors: Cooke, Mike; Goodyear, Andy Journal: ECS transactions Issue: Volume 85:Number 6(2018) Page Start: 71 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. A Raman metrology approach to quality control of 2D MoS2 film fabrication. (5th April 2017) Authors: Mercado, Elisha; Goodyear, Andy; Moffat, Jonathan; Cooke, Mike; Sundaram, Ravi S Journal: Journal of physics Issue: Volume 50:Number 18(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion. (16th May 2019) Authors: Heyne, Markus H; Marinov, Daniil; Braithwaite, Nicholas; Goodyear, Andy; de Marneffe, Jean-François; Cooke, Mike; Radu, Iuliana; Neyts, Erik C; De Gendt, Stefan Journal: 2D materials Issue: Volume 6:Number 3(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Atomic layer etching of SiO2 with Ar and CHF 3 plasmas: A self‐limiting process for aspect ratio independent etching. Issue 9 (22nd May 2019) Authors: Dallorto, Stefano; Goodyear, Andy; Cooke, Mike; Szornel, Julia E.; Ward, Craig; Kastl, Christoph; Schwartzberg, Adam; Rangelow, Ivo W.; Cabrini, Stefano Other Names: Hamaguchi Satoshi guestEditor.; Agarwal Sumit guestEditor.; Zajickova Lenka guestEditor. Journal: Plasma processes and polymers Issue: Volume 16:Issue 9(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation. (1st April 2016) Authors: Zhang, Liping; de Marneffe, Jean-François; Leroy, Floriane; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Maekawa, Kaoru; Yatsuda, Koichi; Dussarrat, Christian; Goodyear, Andy; Cooke, Mike; De Gendt, Stefan; Baklanov, Mikhail R Journal: Journal of physics Issue: Volume 49:Number 17(2016) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗