Author/Creator: Gillot, Christophe - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Gillot, Christophe

1. Communication—The Impact of TaN Barrier Processes on Different Ultra Low-k Dielectrics. (1st January 2015)

Authors:: Zhang, Xunyuan; Gillot, Christophe; Zhao, Larry; Ryan, E. Todd; Wu, Chen
Journal:: ECS journal of solid state science and technology
Issue:: Volume 4:Number 12(2015)
Page Start:: N160
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Communication—The Impact of TaN Barrier Processes on Different Ultra Low-k Dielectrics. (20th October 2015)

Authors:: Zhang, Xunyuan; Gillot, Christophe; Zhao, Larry; Ryan, E. Todd; Wu, Chen
Journal:: ECS journal of solid state science and technology
Issue:: Volume 4:Number 12(2015)
Page Start:: N160
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗