1. The Influence of Adsorption Kinetics on Copper Superfilling for Dual Damascene. Issue 6 (1st January 2016) Authors: Liske, R.; Krause, R.; Uhlig, B.; Gerlich, L.; Bott, S.; Wislicenus, M.; Preusse, A. Journal: Journal of the Electrochemical Society Issue: Volume 163:Issue 6(2016) Page Start: D213 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. The Influence of Adsorption Kinetics on Copper Superfilling for Dual Damascene. Issue 6 (25th February 2016) Authors: Liske, R.; Krause, R.; Uhlig, B.; Gerlich, L.; Bott, S.; Wislicenus, M.; Preusse, A. Journal: Journal of the Electrochemical Society Issue: Volume 163:Issue 6(2016) Page Start: D213 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗