Author/Creator: Geringswald, D. - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Geringswald, D.

1. Optimization of a TiN PE-MOCVD Process Using DoE Methodology. (19th May 2017)

Authors:: Geringswald, D.; Hintze, B.; Ernst, M.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 7(2017)
Page Start:: N76
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Optimization of a TiN PE-MOCVD Process Using DoE Methodology. (1st January 2017)

Authors:: Geringswald, D.; Hintze, B.; Ernst, M.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 7(2017)
Page Start:: N76
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗