1. Dry etching of Co2MnSi magnetic thin films using a CH3OH/Ar based inductively coupled plasma. (January 2015) Authors: Garay, Adrian Adalberto; Hwang, Su Min; Chung, Chee Won Journal: Vacuum Issue: Volume 111(2015) Page Start: 19 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Dry etching of Co2MnSi magnetic thin films using a CH3OH/Ar based inductively coupled plasma. (January 2015) Authors: Garay, Adrian Adalberto; Hwang, Su Min; Chung, Chee Won Journal: Vacuum Issue: Volume 111(2015) Page Start: 19 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Highly anisotropic etching of Ta thin films using high density plasmas of halogen based gases. (November 2016) Authors: Choi, Ji Hyun; Hwang, Su Min; Lee, Jai Yong; Garay, Adrian Adalberto; Chung, Chee Won Journal: Vacuum Issue: Volume 133(2016) Page Start: 18 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Inductively coupled plasma reactive ion etching of CoFeB magnetic thin films in a CH3COOH/Ar gas mixture. (September 2015) Authors: Garay, Adrian Adalberto; Hwang, Su Min; Choi, Ji Hyun; Min, Byoung Chul; Chung, Chee Won Journal: Vacuum Issue: Volume 119(2015) Page Start: 151 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas. (12th August 2015) Authors: Garay, Adrian Adalberto; Choi, Ji Hyun; Hwang, Su Min; Chung, Chee Won Journal: ECS Solid State Letters Issue: Volume 4:Number 10(2015) Page Start: P77 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas. (1st January 2015) Authors: Garay, Adrian Adalberto; Choi, Ji Hyun; Hwang, Su Min; Chung, Chee Won Journal: ECS Solid State Letters Issue: Volume 4:Number 10(2015) Page Start: P77 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗