1. Wet Processing for Post-epi & Pre-furnace Cleans in Silicon Carbide Power MOSFET Fabrication. (11th September 2015) Authors: McMahon, J. Jay; Jahanbani, Mo; Arthur, Stephen; Lilienfeld, David; Gipp, Pete; Gorczyca, Thomas; Formica, J.; Shen, L.; Yamagami, M.; Hillard, Bob; Byrnes, John Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 269 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗