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- Fan, Yuchen [remove] 39
- 621.05 18
- Physics -- Periodicals 18
- Technology -- Periodicals 18
- lamb wave resonator -- effective electromechanical coupling coefficient -- spurious mode supression -- aliminum nitride membrane 18
- Periodicals 8
- 621.38105 5
- Electronic journals 5
- Microelectromechanical systems -- Periodicals 5
- Micromechanics -- Periodicals 5
- laterally-excited bulk acoustic resonator -- electrode pitch -- quality factor -- effective coupling coefficient -- capacitance 5