1. Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms. Issue 29 (30th May 2019) Authors: Dorsey, Kyle J.; Pearson, Tanner G.; Esposito, Edward; Russell, Sierra; Bircan, Baris; Han, Yimo; Miskin, Marc Z.; Muller, David A.; Cohen, Itai; McEuen, Paul L. Journal: Advanced materials Issue: Volume 31:Issue 29(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Micromechanical Systems: Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms (Adv. Mater. 29/2019). Issue 29 (16th July 2019) Authors: Dorsey, Kyle J.; Pearson, Tanner G.; Esposito, Edward; Russell, Sierra; Bircan, Baris; Han, Yimo; Miskin, Marc Z.; Muller, David A.; Cohen, Itai; McEuen, Paul L. Journal: Advanced materials Issue: Volume 31:Issue 29(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗