1. Atomic layer deposition of AlN on different SiC surfaces. Issue 1 (1st March 2022) Authors: Beshkova, M; Deminskyi, P; Hsu, C-W; Shtepliuk, I; Avramova, I; Yakimova, R; Pedersen, H Journal: Journal of physics Issue: Volume 2240:Issue 1(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Atomic layer deposition of AlN using trimethylaluminium and ammonia. (April 2020) Authors: Beshkova, M; Deminskyi, P; Pedersen, H; Yakimova, R Journal: Journal of physics Issue: Volume 1492(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗