1. The optimization of chemical mechanical planarization process-parameters of c-plane gallium-nitride using Taguchi method and grey relational analysis. (15th August 2016) Authors: Nelabhotla, D.M.; Jayaraman, T.V.; Asghar, K.; Das, D. Journal: Materials & design Issue: Volume 104(2016) Page Start: 392 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗