1. A Spatial ALD Oxide Passivation Module in an All-Spatial Etch-Passivation Cluster Concept. (10th September 2015) Authors: Roozeboom, Fred; van den Bruele, Fieke; Creyghton, Yves; Poodt, Paul; Kessels, W.M.M. Journal: ECS transactions Issue: Volume 69:Number 7(2015) Page Start: 243 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO2 for Low-Temperature, Large-Area Applications. (1st January 2017) Authors: Mione, Maria A.; Katsouras, Ilias; Creyghton, Yves; van Boekel, Willem; Maas, Joris; Gelinck, Gerwin; Roozeboom, Fred; Illiberi, Andrea Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 12(2017) Page Start: N243 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO2 for Low-Temperature, Large-Area Applications. (23rd December 2017) Authors: Mione, Maria A.; Katsouras, Ilias; Creyghton, Yves; van Boekel, Willem; Maas, Joris; Gelinck, Gerwin; Roozeboom, Fred; Illiberi, Andrea Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 12(2017) Page Start: N243 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2. (16th August 2016) Authors: Creyghton, Yves; Illiberi, A.; Mione, A.; van Boekel, W.; Debernardi, N.; Seitz, M; van den Bruele, Fieke; Poodt, P.; Roozeboom, Fred Journal: ECS transactions Issue: Volume 75:Number 6(2016) Page Start: 11 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗