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You searched for: Author/Creator Boutaud, B- Boutaud, B [remove] 3
- 621.38105 2
- Microelectromechanical systems -- Periodicals 2
- Micromechanics -- Periodicals 2
- 530.5 1
- Physics -- Congresses 1
- titanium -- Ti membrane -- implantable -- pressure sensor -- capacitive sensor -- long-term monitoring -- intracorporal pressures 1
- titanium deep etching -- nickel mask -- Cl2 -- SF6 -- ICP -- Ti:Ni selectivity -- Ti etch rate 1