1. Thermal Decomposition of Tungsten Nitrido Precursors for Low Temperature MOCVD of WNxCy. (10th September 2015) Authors: Kim, Seo Young; Koley, Arijit; Bonsu, Richard; Nolan, Michelle; McElwee-White, Lisa; Anderson, Tim Journal: ECS transactions Issue: Volume 69:Number 6(2015) Page Start: 101 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗