1. Silicon Micromachining for High Performance Passive Structures at W Band. (2002) Authors: Guillon, B.; Grenier, K.; Parra, T.; Pons, P.; Cros, D.; Blondy, P.; Graffeuil, J.; Cazaux, J. L.; Plana, R. Journal: Active and passive electronic components Issue: Volume 25:Number 1(2002) Page Start: 113 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗