1. Microsecond non-melt UV laser annealing for future 3D-stacked CMOS. (1st June 2022) Authors: Tabata, Toshiyuki; Rozé, Fabien; Thuries, Louis; Halty, Sebastien; Raynal, Pierre-Edouard; Huet, Karim; Mazzamuto, Fulvio; Joshi, Abhijeet; Basol, Bulent M.; Alba, Pablo Acosta; Kerdilès, Sébastien Journal: Applied physics express Issue: Volume 15:Number 6(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗