1. Lloyd's mirror interference lithography with EUV radiation from a high-harmonic source. (9th June 2016) Authors: Kim, Hyun-su; Baksh, Peter; Odstrcil, Michal; Miszczak, Magdalena; Frey, Jeremy G.; Juschkin, Larissa; Brocklesby, William S. Journal: Applied physics express Issue: Volume 9:Number 7(2016:Jul.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗