1. Topographic Complexities and Solutions for High Density BEOL MIM Capacitors. (1st August 2017) Authors: Cheng, Lili; Kakita, Shinichiro; Fox, Robert; Motoyama, Emiko; Lee, Jusang; Azad, Nabil; Hart, Gregory; Ham, Sun; Sharma, Ankur; Beaudoin, Felix; Zhang, Galor Wenyi; de la Garza, Ernesto Gene; Babighian, Pietro; Wang, Tao; Yang, Xiaoming; Augur, Rod; Tang, Teck Jung Journal: ECS transactions Issue: Volume 80:Number 4(2017) Page Start: 233 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗