1. Environmental-Friendly Fluorine Mixture for CVD Cleaning Processes to Replace C2F6, CF4 and NF3. (28th July 2016) Authors: Wieland, Robert; Pittroff, Michael; Boudaden, Jamila; Altmannshofer, Stephan; Kutter, Christoph Journal: ECS transactions Issue: Volume 72:Number 19(2016) Page Start: 23 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗