Designing Artificial Vibration Modes of Piezoelectric Devices Using Programmable, 3D Ordered Structure with Piezoceramic Strain Units. Issue 2 (24th October 2021)

• Record Type: Journal Article
• Authors: Li, Zhanmiao; Yi, Xingyu; Yang, Jikun; Bian, Lang; Yu, Zhonghui; Dong, Shuxiang
• Is Part Of: Advanced materials. Volume 34:Issue 2(2022)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2021-10-24
• Subjects: 3D ordered structure with piezoceramic actuation units (3D OSPSU) -- artificial vibration modes -- co‐fired multilayers -- five‐degree‐of‐freedom micro–nanoactuating platforms -- tunable piezoelectric coefficients; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adma.202107236
• Languages: English
• ISSNs: 0935-9648

Abstract

Abstract: Piezoelectric ceramic devices, which utilize multifarious vibration modes to realize electromechanical coupling and energy conversions, are extensively used in high‐technological fields. However, the excitation of basic modes is mainly subjected to natural eigenfrequency of ceramic devices, which is related to the structure and material parameters. Herein, inspired by metamaterial theory, a programmable, 3D ordered structure with piezoceramic strain units (3D OSPSU) is developed to artificially generate basic modes in a broad frequency band other than only in narrow eigenfrequency. A (2 × 2 × 2) arrayed, co‐fired, multilayer 3D OSPSU is painstakingly designed and fabricated for generating basic modes, such as flexural, extension, shear, torsion, and even coupled modes at nonresonance. To validate the 3D OSPSU method, a five‐degree‐of‐freedom micro–nano actuating platform based on only one co‐fired multilayer ceramic is constructed. The proposed methodology provides a new paradigm for creating extraordinary material properties of piezoelectric ceramics and will inspire brand‐new piezoelectric device designs. Abstract : A programmable, 3D ordered structure with piezoceramic strain units (3D OSPSU) is proposed to artificially generate basic modes, such as flexural, extension, shear, torsion, and even coupled modes in a broad frequency band other than only at eigenfrequency. A five‐degree‐of‐freedom micro–nano actuating platform based on only one 3D OSPSU is constructed, indicating the potential for nano‐operation in microelectronic manufacturing.