Fabrication of highly-oriented β-Ga2O3 thin film on ZnO/AlOx-buffered cyclo-olefin polymer substrate by excimer laser annealing at room temperature. (1st April 2023)

• Record Type: Journal Article
• Authors: Kai, Ryoya; Oga, Tomoaki; Watanabe, Kazuki; Kaneko, Satoru; Matsuda, Akifumi; Yoshimoto, Mamoru
• Is Part Of: Japanese journal of applied physics. Volume 62:Number SB(2023)
• Publication Date: 2023-04-01
• Subjects: Ga2O3 thin film -- cyclo-olefin polymer substrate -- excimer laser annealing -- room temperature fabrication -- oxide buffer layer; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/accc63
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: The fabrication of highly-oriented β -Ga2 O3 thin films on cyclo-olefin polymer (COP) substrates with oxide-buffer layers of amorphous AlO x and c -axis-oriented crystalline ZnO by excimer laser annealing at RT was investigated. An amorphous GaO x thin film deposited on a COP substrate by pulsed laser deposition at RT was irradiated with a pulsed KrF excimer laser from the film surface at RT in air. X-ray diffraction, reflection-high-energy-electron diffraction, and high-resolution transmission-electron microscopy results revealed solid-state crystallization of the uniaxial-oriented β- Ga2 O3 ( 2 ¯ 01) thin film on the ZnO/AlO x -buffered COP substrate. The obtained β- Ga2 O3 thin film exhibited green-, blue-, and UV-band cathode-luminescence.