A Comparative Study on Self‐Aligned Top‐Gate Thin‐Film Transistors with Silicon Nitride as the Interlayer. Issue 7 (5th March 2023)

• Record Type: Journal Article
• Authors: Chen, Yankai; Peng, Junbiao; Li, Min; Xu, Miao; Xu, Hua; Cai, Wei
• Is Part Of: Physica status solidi. Volume 220:Issue 7(2023)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2023-03-05
• Subjects: interlayer deposition -- silicon nitride -- stability -- top gate; Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.202200749
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : Thin‐film transistors (TFTs) with self‐aligned top‐gate structure are fabricated, in which the source/drain region is pretreated to be highly conductive during the deposition of silicon nitride as the interlayer. Without deteriorating the properties of the device's channel layer, the basic performance of TFTs can be simply controlled by altering the SiH4 flow rate during the deposition of silicon nitride film. Furthermore, the diffusion of hydrogen dissociated from SiH4 precursor, which can passivate the electron traps at the interface between the channel and dielectric layer or in the bulk of the dielectric layer, can significantly improve the positive bias temperature stress stability. The charge trapping mechanism is verified using the stretched‐exponential model, and the rising values of the fitting parameters ( ΔV th0 and τ ) show that the TFTs stability improves as the flow rate of SiH4 rises. This approach can reduce the cost and simplify the manufacturing of thin‐film transistors. Abstract : A new method is employed to fabricate the top‐gate structure with highly conductive source/drain region, which uses the doping of interlayer deposition with silicon nitride. Hydrogen dissociated from silane can diffuse into the semiconductor layer to reduce the resistivity and passivate interface defects to improve the positive bias temperature stress (PBTS) stability of thin‐film transistors (TFTs).